Plasma | Free Full-Text | An Inverted Magnetron Operating in HiPIMS Mode
New experimental setup for metallic clusters production based on hollow cylindrical magnetron sputtering: Journal of Vacuum Science & Technology B: Vol 32, No 6
Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system - Kang-Yul Bae, Young-Soo Yang, Bum-Ho Choi, 2013
Kurt J. Lesker Company | R&D Magnetron Sputtering Sources Overview | Enabling Technology for a Better World